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%0 Journal Article
%A Brinksmeier, E.
%A Reese, Stefanie
%A Klink, Andreas
%A Langenhorst, L.
%A Lübben, T.
%A Meinke, Matthias
%A Meyer, D.
%A Riemer, O.
%A Sölter, J.
%T Underlying Mechanisms for Developing Process Signatures in Manufacturing
%J Nanomanufacturing and Metrology
%V 1
%N 4
%@ 2520-8128
%C [Singapore]
%I Springer Singapore
%M RWTH-2019-00410
%P 193-208
%D 2018
%F PUB:(DE-HGF)16
%9 Journal Article
%R 10.1007/s41871-018-0021-z
%U https://publications.rwth-aachen.de/record/753138