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@ARTICLE{Brinksmeier:753138,
      author       = {Brinksmeier, E. and Reese, Stefanie and Klink, Andreas and
                      Langenhorst, L. and Lübben, T. and Meinke, Matthias and
                      Meyer, D. and Riemer, O. and Sölter, J.},
      title        = {{U}nderlying {M}echanisms for {D}eveloping {P}rocess
                      {S}ignatures in {M}anufacturing},
      journal      = {Nanomanufacturing and Metrology},
      volume       = {1},
      number       = {4},
      issn         = {2520-8128},
      address      = {[Singapore]},
      publisher    = {Springer Singapore},
      reportid     = {RWTH-2019-00410},
      pages        = {193-208},
      year         = {2018},
      cin          = {311510 / 417410 / 417410 / 415110 / 417200},
      cid          = {$I:(DE-82)311510_20140620$ / $I:(DE-82)417410_20140620$ /
                      $I:(DE-82)417410_20140620$ / $I:(DE-82)415110_20140620$ /
                      $I:(DE-82)417200_20140620$},
      typ          = {PUB:(DE-HGF)16},
      doi          = {10.1007/s41871-018-0021-z},
      url          = {https://publications.rwth-aachen.de/record/753138},
}