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@INPROCEEDINGS{Honzk:770073,
      author       = {Honzík, Petr and Novak, Antonin and Durand, Stéphane and
                      Joly, Nicolas and Bruneau, Michel},
      title        = {{A}nalytical modelling of a {MEMS} transducer composed of a
                      rigid micro-beam attached at one end to a flat spring moving
                      against a reduced-size backplate},
      address      = {Berlin, Germany},
      publisher    = {Deutsche Gesellschaft für Akustik},
      reportid     = {RWTH-CONV-239662},
      pages        = {7375-7381},
      year         = {2019},
      comment      = {Proceedings of the 23rd International Congress on Acoustics
                      : integrating 4th EAA Euroregio 2019 : 9-13 September 2019
                      in Aachen, Germany / proceedings editors: Martin Ochmann,
                      Michael Vorländer, Janina Fels},
      booktitle     = {Proceedings of the 23rd International
                       Congress on Acoustics : integrating 4th
                       EAA Euroregio 2019 : 9-13 September
                       2019 in Aachen, Germany / proceedings
                       editors: Martin Ochmann, Michael
                       Vorländer, Janina Fels},
      month         = {Sep},
      date          = {2019-09-09},
      organization  = {23. International Congress on
                       Acoustics, Aachen (Germany), 9 Sep 2019
                       - 13 Sep 2019},
      typ          = {PUB:(DE-HGF)7 / PUB:(DE-HGF)8},
      doi          = {10.18154/RWTH-CONV-239662},
      url          = {https://publications.rwth-aachen.de/record/770073},
}