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TY  - JOUR
AU  - Hans, Marcus
AU  - Schneider, Jochen M.
TI  - Electric field strength-dependent accuracy of TiAlN thin film composition measurements by laser-assisted atom probe tomography
JO  - New journal of physics
VL  - 22
SN  - 1367-2630
CY  - [Bad Honnef]
PB  - Dt. Physikalische Ges.
M1  - RWTH-2020-03683
SP  - 033036
PY  - 2020
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000522286900001
DO  - DOI:10.1088/1367-2630/ab7770
UR  - https://publications.rwth-aachen.de/record/786777
ER  -