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@ARTICLE{Hans:786777,
      author       = {Hans, Marcus and Schneider, Jochen M.},
      title        = {{E}lectric field strength-dependent accuracy of {T}i{A}l{N}
                      thin film composition measurements by laser-assisted atom
                      probe tomography},
      journal      = {New journal of physics},
      volume       = {22},
      issn         = {1367-2630},
      address      = {[Bad Honnef]},
      publisher    = {Dt. Physikalische Ges.},
      reportid     = {RWTH-2020-03683},
      pages        = {033036},
      year         = {2020},
      cin          = {521110 / 520000 / 520001},
      ddc          = {530},
      cid          = {$I:(DE-82)521110_20140620$ / $I:(DE-82)520000_20140620$ /
                      $I:(DE-82)520001_20181116$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000522286900001},
      doi          = {10.1088/1367-2630/ab7770},
      url          = {https://publications.rwth-aachen.de/record/786777},
}