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TY  - JOUR
AU  - Deuter, Valerie
AU  - Grochowicz, Maciej
AU  - Brose, Sascha
AU  - Biller, Jan
AU  - Danylyuk, Serhiy
AU  - Taubner, Thomas
AU  - Siemion, Agnieszka
AU  - Grützmacher, Detlev
AU  - Juschkin, Larissa
TI  - Computational proximity lithography with extreme ultraviolet radiation
JO  - Optics express
VL  - 28
IS  - 18
SN  - 1094-4087
CY  - Washington, DC
PB  - Optical Society of America
M1  - RWTH-2020-09340
SP  - 27000-27012
PY  - 2020
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000565713200110
C6  - pmid:32906962
DO  - DOI:10.1364/OE.398805
UR  - https://publications.rwth-aachen.de/record/802247
ER  -