Gast ::
| 001 | 802247 | ||
| 005 | 20240116110631.0 | ||
| 024 | 7 | _ | |2 ISSN |a 1094-4087 |
| 024 | 7 | _ | |2 SCOPUS |a SCOPUS:2-s2.0-85090394687 |
| 024 | 7 | _ | |2 WOS |a WOS:000565713200110 |
| 024 | 7 | _ | |2 datacite_doi |a 10.18154/RWTH-2020-09340 |
| 024 | 7 | _ | |2 doi |a 10.1364/OE.398805 |
| 024 | 7 | _ | |2 pmid |a pmid:32906962 |
| 037 | _ | _ | |a RWTH-2020-09340 |
| 041 | _ | _ | |a English |
| 082 | _ | _ | |a 530 |
| 100 | 1 | _ | |0 P:(DE-82)756327 |a Deuter, Valerie |b 0 |e Corresponding author |u rwth |
| 245 | _ | _ | |a Computational proximity lithography with extreme ultraviolet radiation |h online |
| 260 | _ | _ | |a Washington, DC |b Optical Society of America |c 2020 |
| 336 | 7 | _ | |0 0 |2 EndNote |a Journal Article |
| 336 | 7 | _ | |0 PUB:(DE-HGF)16 |2 PUB:(DE-HGF) |a Journal Article |b journal |m journal |
| 336 | 7 | _ | |2 BibTeX |a ARTICLE |
| 336 | 7 | _ | |2 DRIVER |a article |
| 336 | 7 | _ | |2 DataCite |a Output Types/Journal article |
| 336 | 7 | _ | |2 ORCID |a JOURNAL_ARTICLE |
| 588 | _ | _ | |a Dataset connected to CrossRef |
| 591 | _ | _ | |a Germany |
| 591 | _ | _ | |a Poland |
| 700 | 1 | _ | |0 P:(DE-82)756328 |a Grochowicz, Maciej |b 1 |u rwth |
| 700 | 1 | _ | |0 P:(DE-82)IDM01149 |a Brose, Sascha |b 2 |u rwth |
| 700 | 1 | _ | |0 P:(DE-82)824256 |a Biller, Jan |b 3 |u rwth |
| 700 | 1 | _ | |0 P:(DE-82)IDM02633 |a Danylyuk, Serhiy |b 4 |
| 700 | 1 | _ | |0 P:(DE-82)IDM00127 |a Taubner, Thomas |b 5 |u rwth |
| 700 | 1 | _ | |0 0000-0003-2020-6842 |a Siemion, Agnieszka |b 6 |
| 700 | 1 | _ | |0 P:(DE-82)008613 |a Grützmacher, Detlev |b 7 |u rwth |
| 700 | 1 | _ | |0 P:(DE-82)IDM01488 |a Juschkin, Larissa |b 8 |u rwth |
| 773 | _ | _ | |0 PERI:(DE-600)1491859-6 |a 10.1364/OE.398805 |n 18 |p 27000-27012 |t Optics express |v 28 |x 1094-4087 |y 2020 |
| 856 | 4 | _ | |u https://publications.rwth-aachen.de/record/802247/files/802247.pdf |y OpenAccess |
| 856 | 4 | _ | |u https://publications.rwth-aachen.de/record/802247/files/802247.gif?subformat=icon |x icon |y OpenAccess |
| 856 | 4 | _ | |u https://publications.rwth-aachen.de/record/802247/files/802247.jpg?subformat=icon-180 |x icon-180 |y OpenAccess |
| 856 | 4 | _ | |u https://publications.rwth-aachen.de/record/802247/files/802247.jpg?subformat=icon-700 |x icon-700 |y OpenAccess |
| 909 | C | O | |o oai:publications.rwth-aachen.de:802247 |p VDB |p dnbdelivery |p driver |p open_access |p openaire |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)756327 |a RWTH Aachen |b 0 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)756328 |a RWTH Aachen |b 1 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)IDM01149 |a RWTH Aachen |b 2 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)824256 |a RWTH Aachen |b 3 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)IDM00127 |a RWTH Aachen |b 5 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)008613 |a RWTH Aachen |b 7 |k RWTH |
| 910 | 1 | _ | |0 I:(DE-588b)36225-6 |6 P:(DE-82)IDM01488 |a RWTH Aachen |b 8 |k RWTH |
| 914 | 1 | _ | |y 2020 |
| 915 | 1 | _ | |0 StatID:(DE-HGF)0031 |2 StatID |a Peer reviewed article |x 0 |
| 915 | _ | _ | |0 LIC:(DE-HGF)CCBY4 |2 HGFVOC |a Creative Commons Attribution CC BY 4.0 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0030 |2 StatID |a Peer Review |b DOAJ : Blind peer review |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0100 |2 StatID |a JCR |b OPT EXPRESS : 2018 |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0110 |2 StatID |a WoS |b Science Citation Index |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0111 |2 StatID |a WoS |b Science Citation Index Expanded |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0150 |2 StatID |a DBCoverage |b Web of Science Core Collection |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0160 |2 StatID |a DBCoverage |b Essential Science Indicators |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0199 |2 StatID |a DBCoverage |b Clarivate Analytics Master Journal List |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0200 |2 StatID |a DBCoverage |b SCOPUS |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0300 |2 StatID |a DBCoverage |b Medline |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0310 |2 StatID |a DBCoverage |b NCBI Molecular Biology Database |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0320 |2 StatID |a DBCoverage |b PubMed Central |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0500 |2 StatID |a DBCoverage |b DOAJ |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0501 |2 StatID |a DBCoverage |b DOAJ Seal |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0510 |2 StatID |a OpenAccess |
| 915 | _ | _ | |0 StatID:(DE-HGF)0561 |2 StatID |a Article Processing Charges |f 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)0700 |2 StatID |a Fees |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)1150 |2 StatID |a DBCoverage |b Current Contents - Physical, Chemical and Earth Sciences |d 2020-01-02 |
| 915 | _ | _ | |0 StatID:(DE-HGF)9900 |2 StatID |a IF < 5 |d 2020-01-02 |
| 920 | 1 | _ | |0 I:(DE-82)053100_20140620 |k 053100 |l Fraunhofer-Institut für Lasertechnik - ILT |x 0 |
| 920 | 1 | _ | |0 I:(DE-82)080009_20140620 |k 080009 |l JARA-FIT |x 1 |
| 920 | 1 | _ | |0 I:(DE-82)139420_20140620 |k 139420 |l Lehr- und Forschungsgebiet für Experimentalphysik |x 2 |
| 920 | 1 | _ | |0 I:(DE-82)130000_20140620 |k 130000 |l Fachgruppe Physik |x 3 |
| 920 | 1 | _ | |0 I:(DE-82)418910_20140620 |k 418910 |l Lehrstuhl für Technologie optischer Systeme |x 4 |
| 920 | 1 | _ | |0 I:(DE-82)136720_20140620 |k 136720 |l Lehr- und Forschungsgebiet Metamaterialien und Nano-Optik |x 5 |
| 980 | 1 | _ | |a FullTexts |
| 980 | _ | _ | |a I:(DE-82)053100_20140620 |
| 980 | _ | _ | |a I:(DE-82)080009_20140620 |
| 980 | _ | _ | |a I:(DE-82)130000_20140620 |
| 980 | _ | _ | |a I:(DE-82)136720_20140620 |
| 980 | _ | _ | |a I:(DE-82)139420_20140620 |
| 980 | _ | _ | |a I:(DE-82)418910_20140620 |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a journal |
| Library | Collection | CLSMajor | CLSMinor | Language | Author |
|---|