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%0 Journal Article
%A Walter, P.
%A Wernecke, J.
%A Scholz, M.
%A Reuther, D.
%A Rothkirch, A.
%A Haas, D.
%A Blume, J.
%A Resta, A.
%A Vlad, A.
%A Faley, Olga
%A Schipmann, Susanne
%A Nent, Alexander
%A Seeck, O.
%A Dippel, A.-C.
%A Klemradt, Uwe
%T In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition
%J Journal of materials science
%V 56
%@ 1573-4803
%C Dordrecht [u.a.]
%I Springer Science + Business Media B.V
%M RWTH-2020-10255
%P 290-304
%D 2021
%Z Published: 25 September 2020
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:000572707700002
%R 10.1007/s10853-020-05337-4
%U https://publications.rwth-aachen.de/record/804410