In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition

Walter, P.; Wernecke, J.; Rothkirch, A.; Dippel, A.-C.; Faley, Olga; Reuther, D.; Klemradt, Uwe; Scholz, M.; Schipmann, Susanne; Resta, A.; Vlad, A.; Blume, J.; Haas, D.; Nent, Alexander; Seeck, O.

doi:WOS:000572707700002

TY  - JOUR
AU  - Walter, P.
AU  - Wernecke, J.
AU  - Scholz, M.
AU  - Reuther, D.
AU  - Rothkirch, A.
AU  - Haas, D.
AU  - Blume, J.
AU  - Resta, A.
AU  - Vlad, A.
AU  - Faley, Olga
AU  - Schipmann, Susanne
AU  - Nent, Alexander
AU  - Seeck, O.
AU  - Dippel, A.-C.
AU  - Klemradt, Uwe
TI  - In situ X-ray measurements over large Q-space to study the evolution of oxide thin films prepared by RF sputter deposition
JO  - Journal of materials science
VL  - 56
SN  - 1573-4803
CY  - Dordrecht [u.a.]
PB  - Springer Science + Business Media B.V
M1  - RWTH-2020-10255
SP  - 290-304
PY  - 2021
N1  - Published: 25 September 2020
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000572707700002
DO  - DOI:10.1007/s10853-020-05337-4
UR  - https://publications.rwth-aachen.de/record/804410
ER  -

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