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TY  - JOUR
AU  - Mochi, Iacopo
AU  - Fernandez, Sara
AU  - Nebling, Ricarda
AU  - Locans, Uldis
AU  - Rajeev, Rajendran
AU  - Dejkameh, Atoosa
AU  - Kazazis, Dimitrios
AU  - Tseng, Li-Ting
AU  - Danylyuk, Serhiy
AU  - Juschkin, Larissa
AU  - Ekinci, Yasin
TI  - Quantitative characterization of absorber and phase defects on EUV reticles using coherent diffraction imaging
JO  - Journal of micro/nanolithography, MEMS and MOEMS
VL  - 19
IS  - 1
SN  - 1932-5150
CY  - Bellingham, Wash.
PB  - SPIE
M1  - RWTH-2020-12232
SP  - 014002
PY  - 2020
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:000590135700005
DO  - DOI:10.1117/1.JMM.19.1.014002
UR  - https://publications.rwth-aachen.de/record/808693
ER  -