h1

h2

h3

h4

h5
h6
% IMPORTANT: The following is UTF-8 encoded.  This means that in the presence
% of non-ASCII characters, it will not work with BibTeX 0.99 or older.
% Instead, you should use an up-to-date BibTeX implementation like “bibtex8” or
% “biber”.

@ARTICLE{Mochi:808693,
      author       = {Mochi, Iacopo and Fernandez, Sara and Nebling, Ricarda and
                      Locans, Uldis and Rajeev, Rajendran and Dejkameh, Atoosa and
                      Kazazis, Dimitrios and Tseng, Li-Ting and Danylyuk, Serhiy
                      and Juschkin, Larissa and Ekinci, Yasin},
      title        = {{Q}uantitative characterization of absorber and phase
                      defects on {EUV} reticles using coherent diffraction
                      imaging},
      journal      = {Journal of micro/nanolithography, MEMS and MOEMS},
      volume       = {19},
      number       = {1},
      issn         = {1932-5150},
      address      = {Bellingham, Wash.},
      publisher    = {SPIE},
      reportid     = {RWTH-2020-12232},
      pages        = {014002},
      year         = {2020},
      cin          = {139420 / 130000 / 053100 / 080009},
      ddc          = {620},
      cid          = {$I:(DE-82)139420_20140620$ / $I:(DE-82)130000_20140620$ /
                      $I:(DE-82)053100_20140620$ / $I:(DE-82)080009_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:000590135700005},
      doi          = {10.1117/1.JMM.19.1.014002},
      url          = {https://publications.rwth-aachen.de/record/808693},
}