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@INPROCEEDINGS{Ghafoori:815331,
author = {Ghafoori, Moein and Bahrenberg, Lukas and Glabisch, Sven
and Schröder, Sophia and Danylyuk, Serhiy and Brose, Sascha
and Stollenwerk, Jochen and Juschkin, Larissa and Loosen,
Peter},
title = {{B}roadband scatterometry at extreme ultraviolet
wavelengths for nanograting characterization},
volume = {11611},
address = {Bellingham, Washington},
publisher = {SPIE},
reportid = {RWTH-2021-02582},
series = {Proceedings of SPIE},
pages = {13 Seiten + Poster},
year = {2021},
comment = {Metrology, Inspection, and Process Control for
Semiconductor Manufacturing XXXV : 22-26 February 2021,
online only, Unites States / Ofer Adan, John C. Robinson
(editors) ; sponsored by: SPIE},
booktitle = {Metrology, Inspection, and Process
Control for Semiconductor Manufacturing
XXXV : 22-26 February 2021, online
only, Unites States / Ofer Adan, John
C. Robinson (editors) ; sponsored by:
SPIE},
month = {Feb},
date = {2021-02-22},
organization = {Metrology, Inspection, and Process
Control for Semiconductor Manufacturing
XXXV, online, 22 Feb 2021 - 27 Feb
2021},
cin = {418910 / 080009 / 053100 / 139420 / 130000},
cid = {$I:(DE-82)418910_20140620$ / $I:(DE-82)080009_20140620$ /
$I:(DE-82)053100_20140620$ / $I:(DE-82)139420_20140620$ /
$I:(DE-82)130000_20140620$},
typ = {PUB:(DE-HGF)7 / PUB:(DE-HGF)8},
doi = {10.1117/12.2584738},
url = {https://publications.rwth-aachen.de/record/815331},
}
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