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@PHDTHESIS{Peng:825827,
      author       = {Peng, Yujiang},
      othercontributors = {Schomburg, Werner Karl and Schnakenberg, Uwe},
      title        = {{U}ltraschallthermoformen},
      school       = {Rheinisch-Westfälische Technische Hochschule Aachen},
      type         = {Dissertation},
      address      = {Aachen},
      publisher    = {RWTH Aachen University},
      reportid     = {RWTH-2021-08544},
      pages        = {1 Online-Ressource : Illustrationen},
      year         = {2021},
      note         = {Veröffentlicht auf dem Publikationsserver der RWTH Aachen
                      University; Dissertation, Rheinisch-Westfälische Technische
                      Hochschule Aachen, 2021},
      abstract     = {Ultrasonic thermoforming is a novel process to generate
                      three-dimensional micro structures in the production of
                      thermoplastic microfluidic systems. This thesis focuses on
                      basic investigations of thermoforming with ultrasound.
                      Ultrasonic fabrication techniques are also discussed. For
                      ultrasonic thermoforming, polymer layers are enclosed
                      between two tools and heated up by the vibrations of
                      ultrasound. This way, the polymer adapts to micro structures
                      on the tools within seconds. In the first part of this
                      thesis, basic investigations of ultrasonic thermoforming
                      were launched. Test tools were designed containing micro
                      structures of varied shapes and edge roundings to find out
                      the process window and to better understand the limits of
                      ultrasonic thermoforming. The dimensions of the micro
                      structures fabricated by ultrasonic thermoforming were
                      measured and compared to the dimensions of the tool. No
                      obvious shrinkage of the polymer caused by the process was
                      observed. Experiments showed that rigid tools from aluminum
                      are superior compared to tools from softer material. When
                      using a rigid tool, the process window is much larger. Extra
                      thin foils, 16 to 20 µm in thickness, were successfully
                      thermoformed by a rigid tool with the aid of buffer foils.
                      Measurements showed that the tool fixed on the sonotrode got
                      tens of degrees hotter than the one fixed on the anvil. Both
                      tools got several degrees hotter if the tool with convex
                      microstructures was fixed on the sonotrode compared to fixed
                      on the anvil. On each tool, the temperature in the center
                      was generally higher than in the surrounding area and the
                      difference was about several degrees. The temperature of the
                      thermoformed foils was not homogeneously distributed; it
                      correlated to the shape of the structures. In further
                      developments, electrical elements were integrated into
                      ultrasonically fabricated microsystems. Micro channels and
                      cavities with different dimensions, geometry, and connection
                      were successfully thermoformed into PET-G foils (3 × 5 cm).
                      LEDs were integrated into it by ultrasonic welding with a
                      flat foil. Furthermore, a micro flow sensor with a
                      cylindrical flow channel was fabricated by welding two
                      semi-cylindrical channels onto each other. The flow sensor
                      was tested with three kinds of liquids. Additionally, a
                      variable focus lens was fabricated. Three foils for the lens
                      were ultrasonically fabricated in a single step by combining
                      ultrasonic thermoforming, ultrasonic hot embossing, and
                      ultrasonic punching. After filling with pure water, the
                      focal length of the lens was varied according to the
                      magnetic field generated by an integrated coil. In the last
                      part of this thesis, single-layer PEEK microdiaphragms and
                      composite microdiaphragms were fabricated by ultrasonic
                      thermoforming and welding. Their resonance frequencies were
                      successfully measured and analyzed.},
      cin          = {417420},
      ddc          = {620},
      cid          = {$I:(DE-82)417420_20140620$},
      typ          = {PUB:(DE-HGF)11},
      doi          = {10.18154/RWTH-2021-08544},
      url          = {https://publications.rwth-aachen.de/record/825827},
}