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@ARTICLE{Walter:836848,
      author       = {Walter, Peter and Ilchen, Markus and Roeh, JanTorben and
                      Ohm, Wiebke and Zeuthen, Christian Bonar and Klemradt, Uwe},
      title        = {{I}n {S}itu {X}-ray {M}easurements to {F}ollow the
                      {C}rystallization of {B}a{T}i{O}3 {T}hin {F}ilms during
                      {RF}-{M}agnetron {S}putter {D}eposition},
      journal      = {Applied Sciences},
      volume       = {11},
      number       = {19},
      issn         = {2076-3417},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {RWTH-2021-11636},
      pages        = {8970},
      year         = {2021},
      cin          = {132520 / 080009 / 130000 / 132310},
      ddc          = {600},
      cid          = {$I:(DE-82)132520_20140620$ / $I:(DE-82)080009_20140620$ /
                      $I:(DE-82)130000_20140620$ / $I:(DE-82)132310_20140620$},
      typ          = {PUB:(DE-HGF)16 / PUB:(DE-HGF)7},
      UT           = {WOS:000707739500001},
      doi          = {10.3390/app11198970},
      url          = {https://publications.rwth-aachen.de/record/836848},
}