%0 Journal Article %A Qiu, Depeng %A Duan, Weiyuan %A Lambertz, Andreas %A Bittkau, Karsten %A Qiu, Kaifu %A Rau, Uwe %A Ding, Kaining %T Effect of oxygen and hydrogen flow ratio on indium tin oxide films in rear-junction silicon heterojunction solar cells %J Solar energy %V 231 %@ 1471-1257 %C Amsterdam [u.a.] %I Elsevier Science %M RWTH-2022-00339 %P 578-585 %D 2022 %Z Received 15 September 2021, Revised 25 November 2021, Accepted 7 December 2021, Available online 13 December 2021 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:000731504900004 %R 10.1016/j.solener.2021.12.007 %U https://publications.rwth-aachen.de/record/838107