Probing the onset of wurtzite phase formation in (V,Al)N thin films by transmission electron microscopy and atom probe tomography

Hans, Marcus; Sälker, Janis Alexander; Krause, Janina; Nayak, Ganesh Kumar; Czigány, Zsolt; Holec, David; Schneider, Jochen M.; Neuß, Deborah; Rueß, Holger

doi:10.18154/RWTH-2022-06232

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Probing the onset of wurtzite phase formation in (V,Al)N thin films by transmission electron microscopy and atom probe tomography - RWTH-2022-06232

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