TY - JOUR AU - Tang, Songyao AU - Grundmann, Annika Olivia AU - Fiadziushkin, Hleb AU - Ghiami, Amir AU - Heuken, Michael AU - Vescan, Andrei AU - Kalisch, Holger TI - Detailed study on MOCVD of wafer-scale MoS2 monolayers : From nucleation to coalescence JO - MRS advances VL - 7 IS - 30 SN - 2059-8521 CY - Cham PB - Springer Nature Switzerland AG M1 - RWTH-2022-07939 SP - 751-756 PY - 2022 LB - PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 UR - <Go to ISI:>//WOS:000825228200001 DO - DOI:10.1557/s43580-022-00312-4 UR - https://publications.rwth-aachen.de/record/852128 ER -