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@ARTICLE{Aliramaji:861422,
      author       = {Aliramaji, Shamsa and Keuter, Philipp and Neuß, Deborah
                      and Hans, Marcus and Primetzhofer, Daniel and Depla,
                      Diederik and Schneider, Jochen M.},
      title        = {{E}ffect of {G}rowth {T}emperature and {A}tmosphere
                      {E}xposure {T}ime on {I}mpurity {I}ncorporation in
                      {S}puttered {M}g, {A}l, and {C}a {T}hin {F}ilms},
      journal      = {Materials},
      volume       = {16},
      number       = {1},
      issn         = {1996-1944},
      address      = {Basel},
      publisher    = {MDPI},
      reportid     = {RWTH-2023-00001},
      pages        = {414},
      year         = {2023},
      cin          = {521110 / 041394 / 520000 / 520001},
      ddc          = {600},
      cid          = {$I:(DE-82)521110_20140620$ / $I:(DE-82)041394_20200130$ /
                      $I:(DE-82)520000_20140620$ / $I:(DE-82)520001_20181116$},
      typ          = {PUB:(DE-HGF)16 / PUB:(DE-HGF)7},
      UT           = {WOS:000908625700001},
      doi          = {10.3390/ma16010414},
      url          = {https://publications.rwth-aachen.de/record/861422},
}