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@ARTICLE{Wittmann:889253,
author = {Wittmann, Sebastian and Pindl, Stephan and Sawallich, Simon
and Nagel, Michael and Michalski, Alexander and Pandey,
Himadri and Esteki, Ardeshir and Kataria, Satender and
Lemme, Max C.},
title = {{A}ssessment of wafer-level transfer techniques of graphene
with respect to semiconductor industry requirements},
journal = {Advanced Materials Technologies},
volume = {8},
number = {8},
issn = {2365-709X},
address = {Weinheim},
publisher = {Wiley},
reportid = {RWTH-2023-01062},
pages = {2201587},
year = {2023},
note = {First published: 29 January 2023},
cin = {618710},
ddc = {600},
cid = {$I:(DE-82)618710_20170609$},
pnm = {GIMMIK : Graphenprozessierung auf 200mm Wafern für
mikroelektronische Anwendungen (BMBF-03XP0210F) /
GrapheneCore3 - Graphene Flagship Core Project 3 (881603) /
GrapheneCore2 - Graphene Flagship Core Project 2 (785219) /
2D-EPL - Graphene Flagship 2D Experimental Pilot Line
(952792) / OA - Open Access Publikation mit Unterstützung
der Universitätsbibliothek der RWTH Aachen University
(X021000-OA)},
pid = {G:(DE-82)BMBF-03XP0210F / G:(EU-Grant)881603 /
G:(EU-Grant)785219 / G:(EU-Grant)952792 /
G:(DE-82)X021000-OA},
typ = {PUB:(DE-HGF)16},
UT = {WOS:000921269600001},
doi = {10.1002/admt.202201587},
url = {https://publications.rwth-aachen.de/record/889253},
}
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