Gast ::
| 001 | 96035 | ||
| 005 | 20240719113014.0 | ||
| 020 | _ | _ | |a 978-3-642-19488-7 |
| 020 | _ | _ | |a 978-3-642-19489-4 |
| 024 | 7 | _ | |2 ISSN |a 1865-0899 |
| 024 | 7 | _ | |2 ISSN |a 1865-0902 |
| 024 | 7 | _ | |2 DOI |a 10.1007/978-3-642-19489-4 |
| 024 | 7 | _ | |2 HSB |a 999910043635 |
| 037 | _ | _ | |a RWTH-CONV-107163 |
| 041 | _ | _ | |a English |
| 100 | 1 | _ | |0 P:(DE-82)IDM00796 |a Schomburg, Werner Karl |b 0 |e Author |u rwth |
| 245 | _ | _ | |a Introduction to microsystem design |c Werner Karl Schomburg |h online, print |
| 260 | _ | _ | |a Berlin [u.a.] |b Springer |c 2011 |
| 300 | _ | _ | |a XXI, 319 S. : Ill., graph. Darst. |
| 336 | 7 | _ | |0 PUB:(DE-HGF)3 |2 PUB:(DE-HGF) |a Book |b book |m book |
| 336 | 7 | _ | |2 DRIVER |a book |
| 336 | 7 | _ | |0 1 |2 EndNote |a Book |
| 336 | 7 | _ | |2 DataCite |a Output Types/Book |
| 336 | 7 | _ | |2 ORCID |a BOOK |
| 336 | 7 | _ | |2 BibTeX |a BOOK |
| 490 | 0 | _ | |a RWTHedition |
| 591 | _ | _ | |a Germany |
| 650 | _ | 7 | |2 SWD |a Konstruktion |
| 653 | _ | 7 | |2 ger |a Mikrosysteme |
| 653 | _ | 7 | |2 eng |a MEMS |
| 653 | _ | 7 | |2 eng |a MST |
| 653 | _ | 7 | |2 eng |a Microsystem technology |
| 653 | _ | 7 | |2 eng |a Design |
| 653 | _ | 7 | |2 eng |a Microsystem |
| 653 | _ | 7 | |2 eng |a Basic elements and effects |
| 653 | _ | 7 | |2 eng |a Chracteristic curves |
| 653 | _ | 7 | |2 eng |a Systematic tables of equations |
| 909 | C | O | |o oai:publications.rwth-aachen.de:96035 |p VDB |
| 920 | 1 | _ | |0 I:(DE-82)417420_20140620 |k 417420 |l Lehr- und Forschungsgebiet Konstruktion und Entwicklung von Mikrosystemen |x 0 |
| 970 | _ | _ | |a hsb999910043635 |
| 980 | _ | _ | |a book |
| 980 | _ | _ | |a I:(DE-82)417420_20140620 |
| 980 | _ | _ | |a VDB |
| 980 | _ | _ | |a UNRESTRICTED |
| 980 | _ | _ | |a ConvertedRecord |
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