%0 Journal Article %A Frentzen, Michael %A Michailow, Michail %A Ran, Ke %A Wilck, Noel %A Mayer, Joachim %A Smith, Sean C. %A König, Dirk %A Knoch, Joachim %T Fabrication of ultrasmall si encapsulated in silicon dioxide and silicon nitride as alternative to impurity doping %J Physica status solidi / A %V 220 %N 13 %@ 1862-6300 %C Weinheim %I Wiley-VCH %M RWTH-2023-06402 %P 2300066 %D 2023 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001004594600001 %R 10.1002/pssa.202300066 %U https://publications.rwth-aachen.de/record/960775