h1

h2

h3

h4

h5
h6
%0 Journal Article
%A Frentzen, Michael
%A Michailow, Michail
%A Ran, Ke
%A Wilck, Noel
%A Mayer, Joachim
%A Smith, Sean C.
%A König, Dirk
%A Knoch, Joachim
%T Fabrication of ultrasmall si encapsulated in silicon dioxide and silicon nitride as alternative to impurity doping
%J Physica status solidi / A
%V 220
%N 13
%@ 1862-6300
%C Weinheim
%I Wiley-VCH
%M RWTH-2023-06402
%P 2300066
%D 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001004594600001
%R 10.1002/pssa.202300066
%U https://publications.rwth-aachen.de/record/960775