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TY  - JOUR
AU  - Frentzen, Michael
AU  - Michailow, Michail
AU  - Ran, Ke
AU  - Wilck, Noel
AU  - Mayer, Joachim
AU  - Smith, Sean C.
AU  - König, Dirk
AU  - Knoch, Joachim
TI  - Fabrication of ultrasmall si encapsulated in silicon dioxide and silicon nitride as alternative to impurity doping
JO  - Physica status solidi / A
VL  - 220
IS  - 13
SN  - 1862-6300
CY  - Weinheim
PB  - Wiley-VCH
M1  - RWTH-2023-06402
SP  - 2300066
PY  - 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001004594600001
DO  - DOI:10.1002/pssa.202300066
UR  - https://publications.rwth-aachen.de/record/960775
ER  -