TY - JOUR AU - Frentzen, Michael AU - Michailow, Michail AU - Ran, Ke AU - Wilck, Noel AU - Mayer, Joachim AU - Smith, Sean C. AU - König, Dirk AU - Knoch, Joachim TI - Fabrication of ultrasmall si encapsulated in silicon dioxide and silicon nitride as alternative to impurity doping JO - Physica status solidi / A VL - 220 IS - 13 SN - 1862-6300 CY - Weinheim PB - Wiley-VCH M1 - RWTH-2023-06402 SP - 2300066 PY - 2023 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001004594600001 DO - DOI:10.1002/pssa.202300066 UR - https://publications.rwth-aachen.de/record/960775 ER -