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@ARTICLE{Frentzen:960775,
      author       = {Frentzen, Michael and Michailow, Michail and Ran, Ke and
                      Wilck, Noel and Mayer, Joachim and Smith, Sean C. and
                      König, Dirk and Knoch, Joachim},
      title        = {{F}abrication of ultrasmall si encapsulated in silicon
                      dioxide and silicon nitride as alternative to impurity
                      doping},
      journal      = {Physica status solidi / A},
      volume       = {220},
      number       = {13},
      issn         = {1862-6300},
      address      = {Weinheim},
      publisher    = {Wiley-VCH},
      reportid     = {RWTH-2023-06402},
      pages        = {2300066},
      year         = {2023},
      cin          = {025000 / 616210 / 025010 / 130000},
      ddc          = {530},
      cid          = {$I:(DE-82)025000_20140620$ / $I:(DE-82)616210_20140620$ /
                      $I:(DE-82)025010_20140620$ / $I:(DE-82)130000_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001004594600001},
      doi          = {10.1002/pssa.202300066},
      url          = {https://publications.rwth-aachen.de/record/960775},
}