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%0 Thesis
%A Karimi Aghda, Soheil
%T Influence of point defects on the elastic properties and phase stability of cubic binary and ternary transition metal (aluminum) nitride thin films
%V 41
%I Rheinisch-Westfälische Technische Hochschule Aachen
%V Dissertation
%C Aachen
%M RWTH-2023-06577
%B Materials chemistry dissertation
%P 1 Online-Ressource : Illustrationen, Diagramme
%D 2023
%Z Veröffentlicht auf dem Publikationsserver der RWTH Aachen University
%Z Dissertation, Rheinisch-Westfälische Technische Hochschule Aachen, 2023
%X In the first part of this thesis, a correlative experimental and theoretical model is developed to study the influence of ion kinetic energy on the evolution of point defect structure in metastable cubic (V,Al)N. Ion irradiation-induced changes in the structure and mechanical properties of (V,Al)N thin films deposited by reactive high power pulsed magnetron sputtering (HPPMS) are systematically investigated in the ion kinetic energy (E_k) range from 4 to 154 eV. Increasing E_k results in film densification and the evolution from a columnar (111) oriented structure at E_k ≤ 24 eV to a fine-grained structure with (100) preferred orientation for E_k ≥ 104 eV. Furthermore, the compressive intrinsic stress increases by 336 
%F PUB:(DE-HGF)11 ; PUB:(DE-HGF)3
%9 Dissertation / PhD ThesisBook
%R 10.18154/RWTH-2023-06577
%U https://publications.rwth-aachen.de/record/961005