%0 Journal Article %A Murugan, Divagar %A Tintelott, Marcel J. %A Amiri, Hesam %A Kasavetov, Martin %A Besedin, Denis %A Ingebrandt, Sven %A Vu, Xuan Thang %A Pachauri, Vivek %T Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization %J Physica status solidi / A %@ 1862-6300 %C Weinheim %I Wiley-VCH %M RWTH-2023-08982 %P 2300294 %D 2023 %Z First published: 18 July 2023 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001057215100001 %R 10.1002/pssa.202300294 %U https://publications.rwth-aachen.de/record/969149