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%0 Journal Article
%A Murugan, Divagar
%A Tintelott, Marcel J.
%A Amiri, Hesam
%A Kasavetov, Martin
%A Besedin, Denis
%A Ingebrandt, Sven
%A Vu, Xuan Thang
%A Pachauri, Vivek
%T Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization
%J Physica status solidi / A
%@ 1862-6300
%C Weinheim
%I Wiley-VCH
%M RWTH-2023-08982
%P 2300294
%D 2023
%Z First published: 18 July 2023
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001057215100001
%R 10.1002/pssa.202300294
%U https://publications.rwth-aachen.de/record/969149