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TY  - JOUR
AU  - Murugan, Divagar
AU  - Tintelott, Marcel J.
AU  - Amiri, Hesam
AU  - Kasavetov, Martin
AU  - Besedin, Denis
AU  - Ingebrandt, Sven
AU  - Vu, Xuan Thang
AU  - Pachauri, Vivek
TI  - Comparative Study of Surface Activation Steps for Thermally Grown Oxide Interface and Optimal Silanization
JO  - Physica status solidi / A
SN  - 1862-6300
CY  - Weinheim
PB  - Wiley-VCH
M1  - RWTH-2023-08982
SP  - 2300294
PY  - 2023
N1  - First published: 18 July 2023
LB  - PUB:(DE-HGF)16
UR  - <Go to ISI:>//WOS:001057215100001
DO  - DOI:10.1002/pssa.202300294
UR  - https://publications.rwth-aachen.de/record/969149
ER  -