%0 Journal Article %A Ghiami, Amir %A Sun, Tianyishan %A Fiadziushkin, Hleb %A Tang, Songyao %A Grundmann, Annika Olivia %A Heuken, Michael %A Kalisch, Holger %A Vescan, Andrei %T Optimization of Layer Transfer and Photolithography for Device Integration of 2D-TMDC %J Crystals %V 13 %N 10 %@ 2073-4352 %C Basel %I MDPI %M RWTH-2023-09914 %P 1474 %D 2023 %F PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 %9 Journal ArticleContribution to a book %U <Go to ISI:>//WOS:001094230500001 %R 10.3390/cryst13101474 %U https://publications.rwth-aachen.de/record/971941