TY - JOUR AU - Ghiami, Amir AU - Sun, Tianyishan AU - Fiadziushkin, Hleb AU - Tang, Songyao AU - Grundmann, Annika Olivia AU - Heuken, Michael AU - Kalisch, Holger AU - Vescan, Andrei TI - Optimization of Layer Transfer and Photolithography for Device Integration of 2D-TMDC JO - Crystals VL - 13 IS - 10 SN - 2073-4352 CY - Basel PB - MDPI M1 - RWTH-2023-09914 SP - 1474 PY - 2023 LB - PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 UR - <Go to ISI:>//WOS:001094230500001 DO - DOI:10.3390/cryst13101474 UR - https://publications.rwth-aachen.de/record/971941 ER -