TY - JOUR AU - Kürschner, Dorian AU - Hallum, Goran AU - Huber, Heinz AU - Schulz, Wolfgang TI - Simulation of Laser-Induced Thermo-Mechanical Stress During Ultrafast Laser Ablation of Indium Tin Oxide with Transient Optical Properties JO - Journal of Laser Micro/Nanoengineering VL - 18 IS - 3 SN - 1880-0688 CY - Osaka PB - [Verlag nicht ermittelbar] M1 - RWTH-2024-00576 SP - 177-186 PY - 2023 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001112124600001 DO - DOI:10.2961/jlmn.2023.03.2011 UR - https://publications.rwth-aachen.de/record/977070 ER -