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%0 Journal Article
%A Yamamoto, Yuji
%A Wen, Wei-Chen
%A Schubert, Markus Andreas
%A Corley-Wiciak, Agnieszka Anna
%A Sugawa, Sho
%A Ito, Yuta
%A Yokogawa, Ryo
%A Han, Han
%A Loo, Roger
%A Ogura, Atsushi
%A Tillack, Bernd
%T Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth
%J Japanese journal of applied physics
%V 63
%N 2
%@ 0021-4922
%C Bristol
%I IOP Publ.
%M RWTH-2024-00914
%P 02SP53
%D 2024
%B 55. International Conference on Solid State Devices and Materials
%C 5 Sep 2023 - 8 Sep 2023, Nagoya (Japan)
Y2 5 Sep 2023 - 8 Sep 2023
M2 Nagoya, Japan
%F PUB:(DE-HGF)16 ; PUB:(DE-HGF)8
%9 Journal ArticleContribution to a conference proceedings
%U <Go to ISI:>//WOS:001143752700001
%R 10.35848/1347-4065/ad189d
%U https://publications.rwth-aachen.de/record/977811