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000979629 1001_ $$0P:(DE-82)979690$$aHallum, Goran Erik$$b0$$urwth
000979629 245__ $$aIndium tin oxide ultrafast laser lift-off ablation mechanisms and damage minimization$$honline
000979629 260__ $$aWashington, DC$$bOptica$$c2023
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000979629 7001_ $$0P:(DE-82)785910$$aKürschner, Dorian$$b1$$urwth
000979629 7001_ $$00000-0001-6480-6773$$aEulenkamp, Constanze$$b2
000979629 7001_ $$aAuer, Ramon$$b3
000979629 7001_ $$aHartmann, Bastian$$b4
000979629 7001_ $$0P:(DE-82)IDM01410$$aSchulz, Wolfgang$$b5$$urwth
000979629 7001_ $$00000-0003-2444-9833$$aHuber, Heinz Paul$$b6$$eCorresponding author
000979629 773__ $$0PERI:(DE-600)1491859-6$$a10.1364/OE.504582$$n26$$p43017$$tOptics express$$v31$$x1094-4087$$y2023
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