%0 Journal Article %A Stern, Christian %A Schwab, Christian %A Kindelmann, Moritz %A Stamminger, Mark %A Weirich, Thomas E. %A Park, Inhee %A Hausen, Florian %A Finsterbusch, Martin %A Bram, Martin %A Guillon, Olivier %T Correlative characterization of plasma etching resistance of various aluminum garnets %J Journal of the American Ceramic Society %V 107 %N 11 %@ 1551-2916 %C Oxford [u.a.] %I Wiley-Blackwell %M RWTH-2024-06463 %P 7105-7118 %D 2024 %F PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 %9 Journal ArticleContribution to a book %U <Go to ISI:>//WOS:001247850500001 %R 10.1111/jace.19951 %U https://publications.rwth-aachen.de/record/988878