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TY  - JOUR
AU  - Stern, Christian
AU  - Schwab, Christian
AU  - Kindelmann, Moritz
AU  - Stamminger, Mark
AU  - Weirich, Thomas E.
AU  - Park, Inhee
AU  - Hausen, Florian
AU  - Finsterbusch, Martin
AU  - Bram, Martin
AU  - Guillon, Olivier
TI  - Correlative characterization of plasma etching resistance of various aluminum garnets
JO  - Journal of the American Ceramic Society
VL  - 107
IS  - 11
SN  - 1551-2916
CY  - Oxford [u.a.]
PB  - Wiley-Blackwell
M1  - RWTH-2024-06463
SP  - 7105-7118
PY  - 2024
LB  - PUB:(DE-HGF)16 ; PUB:(DE-HGF)7
UR  - <Go to ISI:>//WOS:001247850500001
DO  - DOI:10.1111/jace.19951
UR  - https://publications.rwth-aachen.de/record/988878
ER  -