TY - JOUR AU - Stern, Christian AU - Schwab, Christian AU - Kindelmann, Moritz AU - Stamminger, Mark AU - Weirich, Thomas E. AU - Park, Inhee AU - Hausen, Florian AU - Finsterbusch, Martin AU - Bram, Martin AU - Guillon, Olivier TI - Correlative characterization of plasma etching resistance of various aluminum garnets JO - Journal of the American Ceramic Society VL - 107 IS - 11 SN - 1551-2916 CY - Oxford [u.a.] PB - Wiley-Blackwell M1 - RWTH-2024-06463 SP - 7105-7118 PY - 2024 LB - PUB:(DE-HGF)16 ; PUB:(DE-HGF)7 UR - <Go to ISI:>//WOS:001247850500001 DO - DOI:10.1111/jace.19951 UR - https://publications.rwth-aachen.de/record/988878 ER -