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@ARTICLE{Stern:988878,
author = {Stern, Christian and Schwab, Christian and Kindelmann,
Moritz and Stamminger, Mark and Weirich, Thomas E. and Park,
Inhee and Hausen, Florian and Finsterbusch, Martin and Bram,
Martin and Guillon, Olivier},
title = {{C}orrelative characterization of plasma etching resistance
of various aluminum garnets},
journal = {Journal of the American Ceramic Society},
volume = {107},
number = {11},
issn = {1551-2916},
address = {Oxford [u.a.]},
publisher = {Wiley-Blackwell},
reportid = {RWTH-2024-06463},
pages = {7105-7118},
year = {2024},
cin = {025000 / 524510 / 520000 / 155620 / 150000 / 080011},
ddc = {660},
cid = {$I:(DE-82)025000_20140620$ / $I:(DE-82)524510_20140620$ /
$I:(DE-82)520000_20140620$ / $I:(DE-82)155620_20231026$ /
$I:(DE-82)150000_20140620$ / $I:(DE-82)080011_20140620$},
typ = {PUB:(DE-HGF)16 / PUB:(DE-HGF)7},
UT = {WOS:001247850500001},
doi = {10.1111/jace.19951},
url = {https://publications.rwth-aachen.de/record/988878},
}