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      <author>Stern, Christian</author>
      <author>Schwab, Christian</author>
      <author>Kindelmann, Moritz</author>
      <author>Stamminger, Mark</author>
      <author>Weirich, Thomas E.</author>
      <author>Park, Inhee</author>
      <author>Hausen, Florian</author>
      <author>Finsterbusch, Martin</author>
      <author>Bram, Martin</author>
      <author>Guillon, Olivier</author>
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      <author>155620</author>
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  <titles>
    <title>Correlative characterization of plasma etching resistance of various aluminum garnets</title>
    <secondary-title>Journal of the American Ceramic Society</secondary-title>
  </titles>
  <periodical>
    <full-title>Journal of the American Ceramic Society</full-title>
  </periodical>
  <publisher>Wiley-Blackwell</publisher>
  <pub-location>Oxford [u.a.]</pub-location>
  <isbn>1551-2916</isbn>
  <electronic-resource-num>10.1111/jace.19951</electronic-resource-num>
  <language>English</language>
  <pages>7105-7118</pages>
  <number>11</number>
  <volume>107</volume>
  <abstract/>
  <notes/>
  <label>0, ; PUB:(DE-HGF)16, ; PUB:(DE-HGF)7, ; </label>
  <keywords/>
  <accession-num>WOS:001247850500001</accession-num>
  <work-type>Journal Article</work-type>
  <dates>
    <pub-dates>
      <year>2024</year>
    </pub-dates>
  </dates>
  <accession-num>RWTH-2024-06463</accession-num>
  <year>2024</year>
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      <url>https://publications.rwth-aachen.de/record/988878</url>
      <url>https://doi.org/10.1111/jace.19951</url>
      <url>&lt;Go to ISI&gt;://WOS:001247850500001</url>
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