%0 Journal Article %A Lukas, Sebastian %A Esteki, Ardeshir %A Rademacher, Nico %A Jangra, Vikas %A Gross, Michael %A Wang, Zhenxing %A Ngo, Ha-Duong %A Bäuscher, Manuel %A Mackowiak, Piotr %A Höppner, Katrin %A Wehenkel, Dominique J. %A van Rijn, Richard %A Lemme, Max C. %T High-Yield Large-Scale Suspended Graphene Membranes over Closed Cavities for Sensor Applications %J ACS nano %V 18 %N 37 %@ 1936-086X %C Washington, DC %I American Chemical Society %M RWTH-2024-08301 %P 25614-25624 %D 2024 %F PUB:(DE-HGF)16 %9 Journal Article %U <Go to ISI:>//WOS:001309487600001 %$ pmid:39244663 %R 10.1021/acsnano.4c06827 %U https://publications.rwth-aachen.de/record/992612