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%0 Journal Article
%A von den Driesch, Nils
%A Kutovyi, Yurii
%A Khamphasithivong, Felix
%A Zass, Anja
%A Schreiber, Lars R.
%A Pawlis, Alexander
%T Shadow Wall Epitaxy of Compound Semiconductors toward All in Situ Fabrication of Quantum Devices
%J ACS applied electronic materials
%V 6
%N 8
%@ 2637-6113
%C Washington, DC
%I ACS Publications
%M RWTH-2024-10526
%P 6246-6252
%D 2024
%F PUB:(DE-HGF)16
%9 Journal Article
%U <Go to ISI:>//WOS:001294165900001
%R 10.1021/acsaelm.4c01104
%U https://publications.rwth-aachen.de/record/996335