TY - JOUR AU - von den Driesch, Nils AU - Kutovyi, Yurii AU - Khamphasithivong, Felix AU - Zass, Anja AU - Schreiber, Lars R. AU - Pawlis, Alexander TI - Shadow Wall Epitaxy of Compound Semiconductors toward All in Situ Fabrication of Quantum Devices JO - ACS applied electronic materials VL - 6 IS - 8 SN - 2637-6113 CY - Washington, DC PB - ACS Publications M1 - RWTH-2024-10526 SP - 6246-6252 PY - 2024 LB - PUB:(DE-HGF)16 UR - <Go to ISI:>//WOS:001294165900001 DO - DOI:10.1021/acsaelm.4c01104 UR - https://publications.rwth-aachen.de/record/996335 ER -