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@ARTICLE{vondenDriesch:996335,
      author       = {von den Driesch, Nils and Kutovyi, Yurii and
                      Khamphasithivong, Felix and Zass, Anja and Schreiber, Lars
                      R. and Pawlis, Alexander},
      title        = {{S}hadow {W}all {E}pitaxy of {C}ompound {S}emiconductors
                      toward {A}ll in {S}itu {F}abrication of {Q}uantum {D}evices},
      journal      = {ACS applied electronic materials},
      volume       = {6},
      number       = {8},
      issn         = {2637-6113},
      address      = {Washington, DC},
      publisher    = {ACS Publications},
      reportid     = {RWTH-2024-10526},
      pages        = {6246-6252},
      year         = {2024},
      cin          = {132210 / 130000 / 080009},
      ddc          = {620},
      cid          = {$I:(DE-82)132210_20140620$ / $I:(DE-82)130000_20140620$ /
                      $I:(DE-82)080009_20140620$},
      typ          = {PUB:(DE-HGF)16},
      UT           = {WOS:001294165900001},
      doi          = {10.1021/acsaelm.4c01104},
      url          = {https://publications.rwth-aachen.de/record/996335},
}