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@PHDTHESIS{Schleenvoigt:999456,
      author       = {Schleenvoigt, Michael},
      othercontributors = {Grützmacher, Detlev and Morgenstern, Markus},
      title        = {{M}olecular beam epitaxy of magnetic topological insulators
                      and their integration into superconducting hybrid devices},
      school       = {RWTH Aachen University},
      type         = {Dissertation},
      address      = {Aachen},
      publisher    = {RWTH Aachen University},
      reportid     = {RWTH-2024-12113},
      pages        = {1 Online-Ressource : Illustrationen},
      year         = {2024},
      note         = {Veröffentlicht auf dem Publikationsserver der RWTH Aachen
                      University 2025; Dissertation, RWTH Aachen University, 2024},
      abstract     = {Among the few approaches towards quantum computing (QC) as
                      the future of computing in a post-Moore’s-law time, the
                      recent push for topological QC is one of the most
                      auspicious. It promises fault tolerant QC by employing
                      exotic Majorana zero mode (MZM) quasiparticle states, which
                      build the basis of the topological QC qubit. Intrinsic
                      protection against relaxation and dephasing distinguishes
                      those elusive qubits from other platforms, like
                      superconducting and spin qubits. Nanowires of 3D topological
                      insulator (TI) – superconductor (SC) hybrid structures are
                      predicted to exhibit MZM at each end of the wire. The
                      one-dimensional confinement however leads to a loss of the
                      topological phase needed to realize the MZMs. An alternative
                      capable of avoiding this problem has gotten much traction
                      lately, which are magnetic topological insulators (MTI),
                      which incorporate magnetic dopants into the TI itself. This
                      thesis focuses on the growth of magnetic TIs via molecular
                      beam epitaxy (MBE) from established recipes for non-magnetic
                      TIs. It will show how complex MTI-SC hybrid devices can be
                      fabricated in situ and will illustrate the difficulties that
                      arise when trying to combine MTIs with SC. First, the growth
                      of 3D TI (BiSb)2Te3 via MBE is optimized to reach a low
                      level of charge carrier density and a high mobility,
                      signifying an appropriate host material for the magnetic
                      dopants. By supplying Cr during thin film growth, high
                      quality magnetically doped films are deposited. First films
                      exhibit an anomalous Hall effect, indicating homogeneous and
                      strong magnetism. In similar Mn-doped films, investigated in
                      parallel, the magnetization is found to less homogeneous,
                      ultimately leading to an focusing onto the more reliable Cr
                      doped MTI films. By creating a trilayer film of CBST and
                      thinning it down to <8 nm a quantization in the Hall
                      resistance is observed, signaling a transition into a
                      quantum anomalous Hall insulator. To investigate the
                      interaction of the MTI and SC, Josephson junction (JJ)
                      devices are created via a stencil lithography process
                      established in our group. The JJ devices show no
                      supercurrent over the junctions, but rather indications for
                      a barrier at the MTI-SC interface due to bad interface
                      transparency between MTI and SC. To rule out ex situ
                      contaminations and to relate the barrier height to the
                      magnetization, a new device layout is developed. It allows
                      for full in situ deposition and enables Hall and JJ
                      measurements in one device. While the low transparency issue
                      persists, indications of induced superconductivity are found
                      when decreasing the magnetic doping in these devices. To
                      further investigate the interplay of topology, magnetism and
                      superconductivity on atomic scales, a novel process is
                      developed in the last chapter: a fully in situ process
                      utilizing removable large-scale ultra-high vacuum
                      lithography (LUL). With LUL, (M)TI and SC films can be grown
                      selectively in situ and aligned to each other with nm
                      precision. Soft cappings of Tellurium or Selenium are
                      investigated to protect the functional surfaces. By
                      exfoliating the stencil mask layer, samples suitable for
                      investigations in scanning tunneling microscopes (STM) are
                      created. In STM, atomic resolution is achieved after capping
                      removal. Tunneling spectra of the SC gap, the TI surface and
                      the magnetic gap are obtained after successful mask and
                      capping removal, showing a short-ranged SC gap profile on
                      the TI. In conclusion, this thesis establishes multiple new
                      material systems in our institute, showcases novel UHV
                      lithography methods for the combination of (M)TIs and SCs,
                      paving the way for the creation of MZMs in hybrid devices,
                      and lastly, by utilizing LUL, provides an innovative process
                      for creating structures and devices of combinations of
                      arbitrary quantum materials in situ that enables
                      measurements in ways unprecedented in STM.},
      cin          = {134610 / 130000},
      ddc          = {530},
      cid          = {$I:(DE-82)134610_20140620$ / $I:(DE-82)130000_20140620$},
      typ          = {PUB:(DE-HGF)11},
      doi          = {10.18154/RWTH-2024-12113},
      url          = {https://publications.rwth-aachen.de/record/999456},
}