; ; ; ; ; ; ; ; ;
In
Laser-based micro- and nanoprocessing XX : 19-22 January 2026, San Francisco, California, United States / Rainer Kling, Wilhelm Pfleging, Koji Sugioka (editors) ; sponsored and published by: SPIE, Seiten/Artikel-Nr: 138810L
2026
Online
DOI: 10.1117/12.3080881
Einrichtungen
Dokumenttyp
Contribution to a book/Contribution to a conference proceedings
Format
online, print
Sprache
English
Anmerkung
Peer review status of article unknown
Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-105039959230
WOS Core Collection: WOS:001775872800017
Interne Identnummern
RWTH-2026-04043
Datensatz-ID: 1033211
Beteiligte Länder
Germany