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Are Circular Shaped Masks Adequate in Adaptive Mask Overlay Topology Synthesis Method?
In
Journal of mechanical design 133(1), Seiten/Artikel-Nr.:011001
2011
Online
DOI: 10.1115/1.4002973
Einrichtungen
Dokumenttyp
Journal Article
Format
online, print
Sprache
English
Anmerkung
Peer reviewed article
Externe Identnummern
INSPEC: 11758783
WOS Core Collection: WOS:000286059100002
SCOPUS: SCOPUS:2-s2.0-78650907147
Interne Identnummern
RWTH-CONV-042461
Datensatz-ID: 164559
Beteiligte Länder
Germany, India
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The record appears in these collections: |
Record created 2013-01-28, last modified 2026-01-06