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Large-Scale Integration of 2D Material Heterostructures by Adhesive Bonding
Quellmalz, Arne (Corresponding author) ; Wang, Xiaojing ; Wagner, Stefan ; Sawallich, SimonRWTH* ; Lemme, Max C.RWTH* ; Gylfason, Kristinn B. ; Roxhed, Niclas ; Stemme, Goran ; Niklaus, Frank
In
MEMS 2020 : the 33rd IEEE International Conference on Micro Electro Mechanical Systems : Vancouver, Canada, January 18-22, 2020 / publisher: IEEE, Seiten/Artikel-Nr: 943-945
2020
Konferenz/Event:33. International Conference on Micro Electro Mechanical Systems
, Vancouver, BC , Canada , MEMS , 2020-01-18 - 2020-01-22
ImpressumPiscataway, NJ : IEEE
Umfang943-945
ISBN978-1-7281-3580-9, 978-1-7281-3581-6, 978-1-7281-3582-3
Datenträger: USB-Stick
Online
DOI: 10.1109/MEMS46641.2020.9056203
10.1109/MEMS46641.2020.9056203
Einrichtungen
- Lehrstuhl für Elektronische Bauelemente (618710)
- AMICA - Advanced Microelectronic Center Aachen (052600)
Projekte
- ULISSES - Ultra low-power integrated optical sensor systems for networked environmental multichannel gas Sensing (825272) (825272)
- GrapheneCore2 - Graphene Flagship Core Project 2 (785219) (785219)
- FLAG-ERA II - The Flagship ERA-NET (730027) (730027)
- BMBF-03EFLNW199 - EXIST-Forschungstransfer : AachenCarbon (BMBF-03EFLNW199) (BMBF-03EFLNW199)
Dokumenttyp
Contribution to a book/Contribution to a conference proceedings
Format
online, print, data medium
Sprache
English
Anmerkung
Peer reviewed article
Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85083155437
WOS Core Collection: WOS:000569381600243
Interne Identnummern
RWTH-2020-10360
Datensatz-ID: 804537
Beteiligte Länder
Germany, Sweden
