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CrN/AlN nanolaminates: Architecture, residual stresses, and cracking behavior
; ; ; ; ; ; ;
In
Journal of vacuum science & technology / A 40(1), Seiten/Artikel-Nr.:013414
2022 & 2021
Submitted: 15 September 2021 Accepted: 02 December 2021 Published Online: 29 December 2021
Online
DOI: 10.1116/6.0001462
URL: https://publications.rwth-aachen.de/record/838502/files/838502.pdf
Einrichtungen
Thematische Einordnung (Klassifikation)
DDC: 530
Restricted: 
PDF
Dokumenttyp
Journal Article
Format
online, print
Sprache
English
Anmerkung
Peer reviewed article
Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85122578346
WOS Core Collection: WOS:000739066500002
Interne Identnummern
RWTH-2022-00640
Datensatz-ID: 838502
Beteiligte Länder
Germany
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