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Stable Al$_{2}$O$_{3}$ Encapsulation of MoS$_{2}$-FETs Enabled by CVD Grown h-BN

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In
Advanced electronic materials 8(9), Seiten/Artikel-Nr.:2200123

ImpressumWeinheim : Wiley-VCH Verlag GmbH & Co. KG

Umfang1-9

ISSN2199-160X

First published: 29 April 2022

Online
DOI: 10.18154/RWTH-2022-04924
DOI: 10.1002/aelm.202200123

URL: https://publications.rwth-aachen.de/record/846873/files/846873.pdf

Einrichtungen

  1. Lehrstuhl für Elektronische Bauelemente (618710)
  2. AMICA - Advanced Microelectronic Center Aachen (052600)


Thematische Einordnung (Klassifikation)
DDC: 621.3

OpenAccess:
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Dokumenttyp
Journal Article

Format
online

Sprache
English

Anmerkung
Peer reviewed article

Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85129114101
WOS Core Collection: WOS:000788538100001

Interne Identnummern
RWTH-2022-04924
Datensatz-ID: 846873

Beteiligte Länder
Germany, Italy, Spain, Switzerland

Lizenzstatus der Zeitschrift

 GO


Medline ; Creative Commons Attribution-NonCommercial-NoDerivs CC BY-NC-ND 4.0 ; OpenAccess ; Clarivate Analytics Master Journal List ; Current Contents - Physical, Chemical and Earth Sciences ; DEAL Wiley ; Essential Science Indicators ; IF >= 5 ; JCR ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection

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Document types > Articles > Journal Articles
Faculty of Electrical Engineering and Information Technology (Fac.6)
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Public records
Publications database
618710
052600

 Record created 2022-05-16, last modified 2023-08-10


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