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Angular resolved mass-energy analysis of species emitted from a dc magnetron sputtered NiW-target

; ; ; ; ; ;

In
Festschrift Honoring Dr. Steve Rossnagel

In
Journal of vacuum science & technology : JVST / A 38(2), Seiten/Artikel-Nr.:023401

ImpressumNew York, NY : American Institute of Physics

Umfang1-10

ISSN1520-8559

Online
DOI: 10.1116/1.5138248

DOI: 10.18154/RWTH-2020-01335
URL: http://publications.rwth-aachen.de/record/781501/files/781501.pdf

Einrichtungen

  1. Lehrstuhl für Werkstoffchemie (521110)
  2. Fachgruppe für Materialwissenschaft und Werkstofftechnik (520000)


Thematische Einordnung (Klassifikation)
DDC: 530

OpenAccess:
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Dokumenttyp
Journal Article/Contribution to a book

Format
online, print

Sprache
English

Anmerkung
Peer reviewed article

Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85078461773
WOS Core Collection: WOS:000515511800001

Interne Identnummern
RWTH-2020-01335
Datensatz-ID: 781501

Beteiligte Länder
Austria, Germany

Lizenzstatus der Zeitschrift

 GO


Medline ; Creative Commons Attribution CC BY 4.0 ; OpenAccess ; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Engineering, Computing and Technology ; Current Contents - Physical, Chemical and Earth Sciences ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; PubMed Central ; SCOPUS ; Science Citation Index ; Science Citation Index Expanded ; Science Citation Index Expanded ; Web of Science Core Collection

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Document types > Books > Contributions to a book
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Faculty of Georesources and Materials Engineering (Fac.5) > Division of Materials Science and Engineering
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521110

 Record created 2020-01-27, last modified 2021-02-09


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