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Ultrashort pulsed laser grooving of semiconductors and dielectrics using UV bursts and DUV

; ; ; ; ; ;

In
Laser-based micro- and nanoprocessing XX : 19-22 January 2026, San Francisco, California, United States / Rainer Kling, Wilhelm Pfleging, Koji Sugioka (editors) ; sponsored and published by: SPIE, Seiten/Artikel-Nr: 9 Seiten

Konferenz/Event:Laser-based Micro- and Nanoprocessing 20 , San Francisco, CA , USA , 2026-01-17 - 2026-01-23

ImpressumBellingham, Washington, USA : SPIE

Umfang9 Seiten

ISBN9781510696761, 9781510696778

ReiheProceedings of SPIE ; 13881

Online
DOI: 10.1117/12.3080743


Einrichtungen

  1. Lehrstuhl für Lasertechnik (418710)
  2. Fraunhofer-Institut für Lasertechnik - ILT (053100)



Dokumenttyp
Contribution to a book/Contribution to a conference proceedings

Format
online, print

Sprache
English

Anmerkung
Peer review status of article unknown

Interne Identnummern
RWTH-2026-04068
Datensatz-ID: 1033248

Beteiligte Länder
Germany

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The record appears in these collections:
Document types > Events > Contributions to a conference proceedings
Document types > Books > Contributions to a book
Faculty of Mechanical Engineering (Fac.4)
Affiliated Institutes and Associations
Public records
Publications database
053100
418710
 Record created 2026-04-10, last modified 2026-05-07
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