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Growth of TiOX Films by High Power Pulsed Magnetron Sputtering from a Compound TiO1.8 Target
; ; ;
In
[Symposium on Complex Oxide Materials for New Technologies held at the 2006 E-MRS Fall Meeting, SEP 04-08, 2006, Warsaw, POLAND]
In
Reviews on advanced materials science : RAMS 15(1), Seiten/Artikel-Nr.:44-48
2007
Einrichtungen
- Lehrstuhl für Experimentalphysik I A und I. Physikalisches Institut (131110)
- Fachgruppe Physik (130000)
Dokumenttyp
Journal Article/Contribution to a conference proceedings
Format
online
Sprache
English
Anmerkung
Peer reviewed article
Externe Identnummern
WOS Core Collection: WOS:000250547100008
SCOPUS: SCOPUS:2-s2.0-38549109684
Interne Identnummern
RWTH-CONV-066231
Datensatz-ID: 190208
Beteiligte Länder
Germany
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