h1

h2

h3

h4

h5
h6
http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png

Depth profiling of microelectronic structures by SIMS and AES



In
Proceedings of the Seventh Czechoslovak Conference on Electronics and Vacuum Physics, Bratislava, September 3 - 6, 1985. - Pt. 1, Seiten/Artikel-Nr: 62-76

Konferenz/Event:7. Czechoslovak Conference on Electronics and Vacuum Physics , Bratislava , Czech Republic , 1985-09-03 - 1985-09-06

ImpressumBratislava

Umfang62-76

TH-Kapsel-Nr.: 11917

Einrichtungen

  1. RWTH Aachen (hsbk000000)



Dokumenttyp
Contribution to a conference proceedings

Format
print

Sprache
English

Anmerkung
Peer review status of article unknown

Interne Identnummern
RWTH-2021-03012
Datensatz-ID: 816162

Beteiligte Länder
Germany

 GO

QR Code for this record

The record appears in these collections:
Document types > Events > Contributions to a conference proceedings
RWTH Aachen (no further subdivision)
Public records
Publications database
 Record created 2021-03-22, last modified 2022-11-03
Similar records



Rate this document:

Rate this document:
1
2
3
4
5
 
(Not yet reviewed)