Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Yamamoto, Yuji; Schubert, Markus Andreas; Wen, Wei-Chen; Ogura, Atsushi; Ito, Yuta; Han, Han; Sugawa, Sho; Tillack, Bernd; Corley-Wiciak, Agnieszka Anna; Yokogawa, Ryo; Loo, Roger

doi:SCOPUS:2-s2.0-85182746291

Thin and locally dislocation-free SiGe virtual substrate fabrication by lateral selective growth

Yamamoto, Yuji (Corresponding author) ; Wen, Wei-Chen ; Schubert, Markus Andreas ; Corley-Wiciak, Agnieszka Anna^RWTH* ; Sugawa, Sho ; Ito, Yuta ; Yokogawa, Ryo ; Han, Han ; Loo, Roger ; Ogura, Atsushi ; Tillack, Bernd

In
Special Issue on Solid State Devices and Materials 2023 (SSDM2023)

In
Japanese journal of applied physics 63(2), Seiten/Artikel-Nr.:02SP53

2024

Konferenz/Event:55. International Conference on Solid State Devices and Materials , Nagoya , Japan , SSDM 2023 , 2023-09-05 - 2023-09-08

ImpressumBristol : IOP Publ.

Umfang1-7

ISSN0021-4922

Online
DOI: 10.35848/1347-4065/ad189d
10.35848/1347-4065/ad189d
DOI: 10.18154/RWTH-2024-00914
URL: https://publications.rwth-aachen.de/record/977811/files/977811.pdf

Einrichtungen

Fachgruppe Physik (130000)

Thematische Einordnung (Klassifikation)
DDC: 530

OpenAccess:
PDF

Dokumenttyp
Journal Article/Contribution to a conference proceedings

Format
online, print

Sprache
English

Anmerkung
Peer reviewed article

Externe Identnummern
SCOPUS: SCOPUS:2-s2.0-85182746291
WOS Core Collection: WOS:001143752700001

Interne Identnummern
RWTH-2024-00914
Datensatz-ID: 977811

Beteiligte Länder
Belgium, Germany, Japan

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; Clarivate Analytics Master Journal List ; Current Contents - Electronics and Telecommunications Collection ; Current Contents - Physical, Chemical and Earth Sciences ; Essential Science Indicators ; IF < 5 ; JCR ; National-Konsortium ; SCOPUS ; Science Citation Index Expanded ; Web of Science Core Collection